CRYSTALLIZATION APPARATUS, CRYSTALLIZATION METHOD, AND HEAT TREATMENT SYSTEM

摘要

PURPOSE: A crystallizing apparatus, a crystallizing method, and a thermal process system are provided to reduce crystallization time and costs by complementing a crystallization curing of an object through one thermal process. CONSTITUTION: A chamber(110) maintains a vacuum condition. An object(5) for crystallization is inputted to or outputted from the chamber. A receiving unit(120) includes a heating unit which heats the object. A thermal processing unit(130) heats the object located on the receiving unit and includes a first heating unit(131) and a second heating unit(132).