| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mask locking tool of a mask case stationarily fixed in the case without coming into contact with a photomask face and capable of preventing damage of a photomask and generation of static electricity caused by slippage in the mask locking tool in the case for storing or carrying a photomask substrate. <P>SOLUTION: Mask locking tools of a mask case are formed of resin in which carbon is mixed and are placed at respective corner parts of the four corners inside the mask case. The mask locking tool includes branch parts extending from a locking tool base body via a curved arm, projection parts positioned in their upper face direction, and inclined surfaced provided on one face of the projection parts. The mask is mounted on the branch parts, with the inclined surfaces coming into contact with the edge lines of the mask, and the curved arm is downward bent to elastically retain the mask. <P>COPYRIGHT: (C)2013,JPO&INPIT |
