| 摘要 |
A laser process apparatus is provided to fuse an adhesive film mounted on a semiconductor chip without damaging the same by using a process line map generated based on image data. A process region detector(6) photographs a plurality of process regions by a predetermined interval along a process conveying direction when a target is moved to the process conveying direction to generate image data. The generated image data is sent to a controller(8). The controller calculates coordinates with respect to a multiplicity of process positions to be processed based on the image data generated by the process region detector. The controller makes a process line map which links the coordinates and then controls a process conveyer(37) and separated conveyers(38,43). |
