| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a flat panel display capable of maintaining display quality while performing heat treatment of electrodes, dielectrics or the like formed on a substrate at an exact temperature. <P>SOLUTION: In a manufacturing method for a flat panel display, a substrate is mounted on a support material 31 to perform heat treatment. In the manufacturing method, liquid 32 volatilized at a heat treatment temperature or below is arranged between the substrate and the support material. <P>COPYRIGHT: (C)2013,JPO&INPIT |
