| 摘要 |
A chucking member and a method for chucking a substrate are provided to reduce the amount of process liquid splashed by a chucking pin by supporting the substrate using a pointed front end portion of the chucking pin. A chucking member(100) spins together with a substrate while chucking a side portion of the substrate and comprises a body(140), a chucking pin(120), and a rotary shaft(160). The body is capable of spinning. The chucking pin for chucking the side portion of the substrate is assembled to an upper side of the body offsetting from the center of rotation of the body. The rotary shaft, assembled to a lower side of the body, rotates together with the body. The chucking pin has a pointed front end portion(122) which makes contact with the side portion of the substrate, and a triangular cross-sectional shape.
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