发明名称 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 According to one embodiment, a nonvolatile semiconductor memory device includes a fin-type stacked layer structure in which a first insulating layer, a first semiconductor layer, . . . an n-th insulating layer, an n-th semiconductor layer, and an (n+1)-th insulating layer (n is a natural number equal to or more than 2) are stacked in order thereof in a first direction perpendicular to a surface of a semiconductor substrate and which extends in a second direction parallel to the surface of the semiconductor substrate, first to n-th memory strings which use the first to n-th semiconductor layers as channels respectively, a common semiconductor layer which combines the first to n-th semiconductor layers at first ends of the first to n-th memory strings in the second direction.
申请公布号 US2013015520(A1) 申请公布日期 2013.01.17
申请号 US201213622644 申请日期 2012.09.19
申请人 SHOSUKE FUJII;NAGISHIMA DAISUKE;SAKUMA KIWAMU 发明人 SHOSUKE FUJII;NAGISHIMA DAISUKE;SAKUMA KIWAMU
分类号 H01L29/792;H01L21/336 主分类号 H01L29/792
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