发明名称 |
METHOD FOR DOPING A SEMICONDUCTOR SUBSTRATE, AND SOLAR CELL HAVING TWO-STAGE DOPING |
摘要 |
A method for doping a semiconductor substrate includes heating the semiconductor substrate by irradiation with laser radiation and at the same time diffusing dopant from a dopant source into the semiconductor substrate in heated regions. The semiconductor substrate is heated by the irradiation with laser radiation. A surface portion of the semiconductor substrate that is less than 10% of the total surface of all irradiated regions is melted and recrystallized. There is also provided a solar cell.
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申请公布号 |
US2013014819(A1) |
申请公布日期 |
2013.01.17 |
申请号 |
US201113582499 |
申请日期 |
2011.03.03 |
申请人 |
CENTROTHERM PHOTOVOLTAICS AG;TEPPE ANDREAS;GEIGER MATTHIAS;SCHLOSSER REINHOLD;MUENZER ADOLF;SCHOENE JAN;ISENBERG JOERG;KUEHN TINO;KELLER STEFFEN |
发明人 |
TEPPE ANDREAS;GEIGER MATTHIAS;SCHLOSSER REINHOLD;MUENZER ADOLF;SCHOENE JAN;ISENBERG JOERG;KUEHN TINO;KELLER STEFFEN |
分类号 |
H01L31/0236;H01L31/068;H01L31/18 |
主分类号 |
H01L31/0236 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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