| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and apparatus capable of recovering silicon machining powder with less impurity of the silicon machining powder generated when cutting out silicon. <P>SOLUTION: The apparatus for recovering the silicon machining powder has a wire 4, a beam 17 for attaching an ingot with adhesive 20, a coolant supplying nozzle 2a, a coolant receiving tanks 10, 11 receiving cooling after using, circulation tanks 12, 13, a means 16 for switching a circulation passage piping 2b and the circulation tank, a moving means 33 for moving coolant receiving tanks 10, 11, and a means 5 detecting whether the wire comes into contact with the adhesive or the beam and selects the circulation passage and the coolant receiving tank to be used according to detected signals. <P>COPYRIGHT: (C)2013,JPO&INPIT |
