| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electret film capable of maintaining a large electric charge density for a long period of time, and a vibration power generating element having a small-sized, high-output and stereoscopic interdigital electrode structure provided with the electret film. <P>SOLUTION: The electret film according to the invention includes a first SiO<SB POS="POST">2</SB>layer provided on an Si substrate so as to be in contact with a base material of the Si, an ion impermeable film provided on the first SiO<SB POS="POST">2</SB>layer so as to be in contact with the first SiO<SB POS="POST">2</SB>layer, and a second SiO<SB POS="POST">2</SB>layer provided on the ion impermeable film so as to be in contact with the ion impermeable film, and alkali ions are contained in the first SiO<SB POS="POST">2</SB>layer. <P>COPYRIGHT: (C)2013,JPO&INPIT |
