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发明名称
CHEMICAL-MECHANICAL PLANARIZATION PAD
摘要
申请公布号
EP2242614(A4)
申请公布日期
2013.01.16
申请号
EP20080867501
申请日期
2008.12.31
申请人
INNOPAD, INC.
发明人
HSU, OSCAR, K.;LEFEVRE, PAUL;JIN, MARC, C.;ALDEBORGH, JOHN, ERIK;WELLS, DAVID, ADAM
分类号
B24B37/22;B24B37/24;B24D11/00;B24D18/00
主分类号
B24B37/22
代理机构
代理人
主权项
地址
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