Silicon wafer and method for producing the same,申请号EP20090168545-传众专利搜索

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发明名称	Silicon wafer and method for producing the same
摘要
申请公布号	EP2159828(B1)	申请公布日期	2013.01.16
申请号	EP20090168545	申请日期	2009.08.25
申请人	SUMCO CORPORATION	发明人	UMENO, SHIGERU;NISHIMOTO, MANABU;HOURAI, MASATAKA
分类号	H01L21/261;C30B15/20;C30B29/06;H01L21/322;H01L21/331;H01L29/739	主分类号	H01L21/261
代理机构		代理人
主权项
地址

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