发明名称 Vertical cavity surface emitting laser and atomic oscillator
摘要 A vertical cavity surface emitting laser includes: a substrate; and a laminated body which is provided over the substrate, wherein the laminated body includes a first mirror layer provided over the substrate, an active layer provided over the first mirror layer, and a second mirror layer provided over the active layer, in a plan view, the laminated body includes a first portion having a first width, a second portion having a second width, and a third portion which is provided between the first portion and the second portion and has a third width wider than the first width or the second width, and a resin layer which covers at least one portion of the first portion is provided.
申请公布号 US9360845(B2) 申请公布日期 2016.06.07
申请号 US201414573293 申请日期 2014.12.17
申请人 Seiko Epson Corporation 发明人 Kaneko Tsuyoshi;Nishida Tetsuo;Kurachi Yuji
分类号 H01S5/00;G04F5/14;H01S5/183;H03L7/26;H01S5/042 主分类号 H01S5/00
代理机构 Harness, Dickey & Pierce, P.L.C. 代理人 Harness, Dickey & Pierce, P.L.C.
主权项 1. A vertical cavity surface emitting laser comprising: a substrate; a laminated body which is provided on the substrate, and a resin layer covering at least one portion of the laminated body, wherein the laminated body includes a first mirror layer, a second mirror layer, and an active layer which is provided between the first mirror layer and the second mirror layer in a plan view, the laminated body includes a first portion, a second portion, and a third portion, the first portion and the second portion being disposed opposing to each other via the third portion along a first direction, the first portion has a first width in a second direction which is orthogonal to the first direction, the second portion has a second width in the second direction, the third portion has a third width in the second direction, and the third width is greater than the first width or the second width, in the plan view, the laminated body has a fourth width in the first direction, the fourth width being greater than the third width, the resin layer covers at least one portion of the first portion, and the first, second, and third portions of the laminated body each include portions of the first mirror layer, active layer, and second mirror layer.
地址 JP