发明名称 |
A METHOD FOR IMAGING WORKPIECE SURFACES AT HIGH ROBOT TRANSFER SPEEDS WITH CORRECTION OF MOTION-INDUCED DISTORTION |
摘要 |
<p>A method is provided for imaging a workpiece by capturing successive frames of an elongate stationary field of view transverse to a workpiece transit path of a robot, while the workpiece is transported by the robot. The robot transit path is illuminated with an elongate illumination pattern transverse to the transit path to obtain a workpiece image of successive frames. Motion-induced image distortion is corrected by computing respective correct locations of respective ones of the frames along the transit path.</p> |
申请公布号 |
KR20130006449(A) |
申请公布日期 |
2013.01.16 |
申请号 |
KR20127024080 |
申请日期 |
2011.01.21 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RAVID ABRAHAM;EGAN TODD;LINGEL KAREN |
分类号 |
H01L21/68;B25J13/08;G01B11/00;H01L21/677 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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