发明名称 A METHOD FOR IMAGING WORKPIECE SURFACES AT HIGH ROBOT TRANSFER SPEEDS WITH CORRECTION OF MOTION-INDUCED DISTORTION
摘要 <p>A method is provided for imaging a workpiece by capturing successive frames of an elongate stationary field of view transverse to a workpiece transit path of a robot, while the workpiece is transported by the robot. The robot transit path is illuminated with an elongate illumination pattern transverse to the transit path to obtain a workpiece image of successive frames. Motion-induced image distortion is corrected by computing respective correct locations of respective ones of the frames along the transit path.</p>
申请公布号 KR20130006449(A) 申请公布日期 2013.01.16
申请号 KR20127024080 申请日期 2011.01.21
申请人 APPLIED MATERIALS, INC. 发明人 RAVID ABRAHAM;EGAN TODD;LINGEL KAREN
分类号 H01L21/68;B25J13/08;G01B11/00;H01L21/677 主分类号 H01L21/68
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