发明名称 ALIGNER FOR BOARD AND CONTROLLING METHOD FOR THE SAME
摘要 PURPOSE: An apparatus for aligning a substrate and a method for controlling the same are provided to improve the accuracy of alignment. CONSTITUTION: A stage(110) comprises an absorbing body to absorb a substrate(10). A stopper(120) is protruded from the stage to support at least one side of the substrate placed in the stage. At least one pushers(132,134) push the substrate placed in the stage toward the stopper. An upper press(140) is installed in the upper side of stage to move up and down and presses the substrate placed on the stage. The top press compresses the substrate placed in the stage. The stopper is formed to support two sides of the edge of the substrate and is accommodated in the stage.
申请公布号 KR20130005636(A) 申请公布日期 2013.01.16
申请号 KR20110067150 申请日期 2011.07.07
申请人 WOORI MICRON INC. 发明人 PARK, NOH SUN;KANG, MIN CHEOL
分类号 H05K13/02;H01L21/68 主分类号 H05K13/02
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