MEMBRANE FOR CHEMICAL MECHANICAL POLISHING

摘要

PURPOSE: A membrane for chemical mechanical polishing device is provided to prevent the discoloration by a by-product by using platinum-based catalyst instead of a peroxide initiator. CONSTITUTION: Poly silicon compound consists of polymer chains. The polymer chains are cross-linked at the end of the poly silicon compound. The polymer chains are combined with vinyl group. Platinum catalyst is used for crosslink reaction. Silicon particles are filled in the poly silicon compound. [Reference numerals] (AA) Before aging test; (BB) After aging test; (CC) Longitude(shoah A); (DD) M company; (EE) This invention