摘要 |
A piezoelectric film of a perovskite oxide represented by a general expression (P) below and has a pyrochlore free single phase perovskite structure with a/b≦̸1.06. Pba(Zrx,Tiy,Mb-x-y)bOc  (P) (where, M represents one or more types of metal elements, 0<x<b, 0<y<b, 0≦̸b-x-y, and a:b:c=1:1:3 is standard, but the molar ratio may deviate from the standard within a range in which a perovskite structure can be obtained.)
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