发明名称 Solid-state image device manufacturing method thereof, and image capturing apparatus with first and second stress liner films
摘要 A solid-state image device is provided which includes: a photoelectric conversion portion which obtains a signal charge by photoelectric conversion of incident light; a pixel transistor portion which outputs a signal charge generated by the photoelectric conversion portion; a peripheral circuit portion which is provided at the periphery of a pixel portion including the photoelectric conversion portion and the pixel transistor portion and which has an NMOS transistor and a PMOS transistor; a first stress liner film which has a compressive stress and which is provided on the PMOS transistor; and a second stress liner film which has a tensile stress and which is provided on the NMOS transistor. In the solid-state image device described above, the photoelectric conversion portion, the pixel transistor portion, and the peripheral circuit portion are provided in and/or on a semiconductor substrate.
申请公布号 US8354631(B2) 申请公布日期 2013.01.15
申请号 US20100656423 申请日期 2010.01.29
申请人 SONY CORPORATION;TATESHITA YASUSHI 发明人 TATESHITA YASUSHI
分类号 H01L31/00;H01L21/70 主分类号 H01L31/00
代理机构 代理人
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