| 摘要 |
In a vacuum processing apparatus including a processing chamber having a transfer port, and a transfer chamber connected via a gate chamber to the transfer port, diffusion of a gas remaining in the processing chamber into the transfer chamber is suppressed. In order to suppress diffusion of gas from the processing chamber into the transfer chamber, the gate chamber is provided with a non-reactive gas supply unit and an exhaust port adapted to produce a stream of a non-reactive gas at a region facing the transfer port. This suppresses diffusion of gas from the processing chamber into the transfer chamber through the transfer port. |
