| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate heating apparatus capable of preventing erroneous detection of disconnection without spoiling such a function as to surely detect disconnection of lamp heaters, and excellent in productivity. <P>SOLUTION: Lamp heaters 21 in heater units 2R, 2L composed of the lamp heaters are divided every two or more lamp heaters to form heater groups in a heating chamber 11a, and the heater groups are parallel connected with each other and electric power is supplied to each of them. A disconnection detecting means is provided for detecting disconnection of the heaters if detection reference characteristic passing through a plurality of flection points is obtained in advance based on changes of a current value during heating control of the heater units, and the current value obtained when heating of a processing substrate is controlled by a control means 7 with a substrate W facing the heater units exceeds an allowable range set based on the detection reference characteristic. A cancelling means is provided for cancelling detection of the disconnection detecting means if an amount of current value change per unit time is measured, and the amount of change at the time when the current value varies beyond the allowable range is not more than a prescribed value. <P>COPYRIGHT: (C)2013,JPO&INPIT |
