A METHOD OF FABRICATING A NANOCOMPOSITE THIN FILM WITH METALLIC NANOPARTICLES

摘要

The present invention provides a method for fabricating a nanocomposite thin film with a plurality of metallic nanoparticles. The method comprising depositing an insulating layer onto the surface of a substrate; depositing a metallic film on the surface of the insulating layer; annealing the metallic film, wherein annealing nucleates the metallic film to form the metallic nanoparticles on the insulating layer; and depositing a metallic thin film onto the insulating layer by a selective chemical vapour deposition tccliniquc, wherein depositing of the metallic thin film partially embeds the metallic nanoparticles within the metallic thin film, the surfaces of the metallic nanoparticles does not absorb the metallic thin film; wherein at least part of the outer surfaces of the metallic nanoparticles arc exposed in the metallic thin film.