发明名称 ELECTRIC CONTACT
摘要 <P>PROBLEM TO BE SOLVED: To provide an electric contact capable of improving current resistance performance while maintaining stylus pressure and high frequency characteristics in elastic deformation. <P>SOLUTION: A contact probe 100 is composed of an elastic deformation part 1 and a contact part 2. The elastic deformation part 1 is composed of: long and thin plate-like bodies 10A, 10B to be elastically deformed by force of a longitudinal direction; a stylus connection part 12 arranging the contact part 2 on a work facing surface 12w intersecting with the longitudinal direction of the plate-like bodies 10A, 10B and mutually connecting one-ends of the plate-like bodies 10A, 10B while mutually opposing main surfaces through cavities 10S; and a stylus base connection part 11 for mutually connecting the other ends of the plate-like bodies 10A, 10B. The plate-like bodies 10A, 10B are formed from stress layers 101, 103 composed of a first conductive metal and a conductive layer 102 composed of a second conductive metal with a specific resistance lower than that of the first conductive metal, and the mechanical strength of the first conductive metal is higher than that of the second conductive metal. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013007700(A) 申请公布日期 2013.01.10
申请号 JP20110141751 申请日期 2011.06.27
申请人 JAPAN ELECTRONIC MATERIALS CORP 发明人 KIMURA TEPPEI;NAGATA KAZUSHI;ARITA NAOKI
分类号 G01R1/073;H01L21/66 主分类号 G01R1/073
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