| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a carbon nanotube film having excellent reproducibility, capable of spinning stably a carbon nanotube. <P>SOLUTION: A metal catalyst is deposited on the surface of a planar substrate, and then the atmosphere of the substrate is changed as shown in Fig.1, to thereby produce a carbon nanotube film on the surface of the substrate. Namely, the atmosphere of the substrate is replaced with hydrogen gas, and the temperature of the substrate and its atmosphere is raised up to 500°C which is a metal catalyst activation temperature, and kept at the temperature for 3 minutes. Successively, the temperature of the substrate and its atmosphere is lowered to 200-500°C, and hydrocarbon gas is introduced into the atmosphere of the substrate. Then, after keeping the temperature of the substrate and its atmosphere as it is for 0-3 minutes, the temperature of the substrate and its atmosphere is raised up to 700°C which is a CNT synthesis temperature. The temperature of the substrate and its atmosphere is kept at 700°C for 10 minutes, while introducing the hydrocarbon gas therein, to thereby form a carbon nanotube film. <P>COPYRIGHT: (C)2013,JPO&INPIT |
