发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 A semiconductor device and a method for fabricating a semiconductor device are provided. The method for fabricating a semiconductor device includes forming an isolation layer over a semiconductor substrate defining first and second regions, etching the isolation layer at an edge of the first region to form a guard ring pattern, forming a buried guard ring filling the guard ring pattern, selectively etching the isolation layer of the first region to form a plurality of patterns, forming a plurality of conductive patterns in the respective patterns, and completely removing the isolation layer of the first region through a dip-out process.
申请公布号 US2013009273(A1) 申请公布日期 2013.01.10
申请号 US201213620353 申请日期 2012.09.14
申请人 KIM JIN-A;JIE SEOK-HO 发明人 KIM JIN-A;JIE SEOK-HO
分类号 H01L29/02 主分类号 H01L29/02
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