Substrate holding device for holding planar substrate e.g. silicon wafer of electronic components, has substrate brackets arranged with respect to frame longitudinal elements, which are provided in the slide bar

摘要

The substrate holding device (1) has transverse frame elements (3) which are arranged in the direction orthogonal to central axis of the frame cross elements (4). The frame cross elements are interconnected with frame longitudinal elements (5). The substrate brackets (6) arranged with respect to frame longitudinal elements are provided in the slide bar. The clamp strip is provided opposite to the slide bar such that the slide bar is moved in the longitudinal direction by linear actuator. The substrate clamp cylinders are supported in slide bearings.