摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor unit that attenuates noise by suppressing a parasitic capacitance and variation thereof between a signal line and a frame ground and also has a high-pressure and high-withstand-voltage characteristic. <P>SOLUTION: A sensor unit includes: a ceramic member having a first surface and a second surface which face each other with a predetermined thickness; a sensor part mounted on the first surface side; multiple metallic pins arranged by fixing to the second surface side; multiple internal wires penetrating the ceramic member and connecting the sensor part to the metallic pins; and a metallic member formed at the peripheral end of the second surface side and joined with a housing by welding. <P>COPYRIGHT: (C)2013,JPO&INPIT |