发明名称 ACTIVE MATRIX SUBSTRATE
摘要 Disposed on an insulating substrate (10a) are a plurality of TFTs arranged in a matrix, each including a drain electrode (18b) in which a first conductive layer (16b) and a second conductive layer (17bb) are laminated in this order; an interlayer insulating film (21) deposited on each of the TFTs, in which a plurality of contact holes (21a) reaching to the respective drain electrodes (18b) are formed; and a plurality of pixel electrodes (22a) disposed on the interlayer insulating film (21) in a matrix, each connected to a corresponding drain electrode (18b) via a corresponding contact hole (21a), being susceptible to an electric corrosion reaction with the second conductive layer (17bb). At a side of the drain electrode, which is connected to the pixel electrode (22a), a top surface of the first conductive layer (16b) is exposed from the second conductive layer (17bb). The interlayer insulating film (21) is disposed to cover the second conductive layer (17bb).
申请公布号 US2013009160(A1) 申请公布日期 2013.01.10
申请号 US201013635200 申请日期 2010.12.07
申请人 SHARP KABUSHIKI KAISHA;KATSUI HIROMITSU;NAKAMURA WATARU;KITOH KENICHI 发明人 KATSUI HIROMITSU;NAKAMURA WATARU;KITOH KENICHI
分类号 H01L27/15 主分类号 H01L27/15
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