发明名称 |
REFLECTIVE SURFACE SHAPE CONTROLLABLE MIRROR DEVICE, AND METHOD FOR MANUFACTURING REFLECTIVE SURFACE SHAPE CONTROLLABLE MIRROR |
摘要 |
The device is configured from: a reflective surface shape controllable mirror in which a band-shaped X-ray reflective surface 2 is formed on a central portion of a front surface of a substrate 1, reference planes 3 are formed along both sides of the X-ray reflective surface, and a plurality of piezoelectric elements 4 are attached to at least one of front and back surfaces of the substrate so as to be arranged in the longitudinal direction of the X-ray reflective surface on both side portions of the substrate, and a multichannel control system for applying a voltage to each of the piezoelectric elements.
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申请公布号 |
US2013010929(A1) |
申请公布日期 |
2013.01.10 |
申请号 |
US201013519175 |
申请日期 |
2010.12.28 |
申请人 |
YAMAUCHI KAZUTO;KIMURA TAKASHI;TSUMURA TAKASHI |
发明人 |
YAMAUCHI KAZUTO;KIMURA TAKASHI;TSUMURA TAKASHI |
分类号 |
G21K1/06;G21K1/087;H01L41/22 |
主分类号 |
G21K1/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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