| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor capable of being simply formed on a semiconductor substrate. <P>SOLUTION: A sensor for detecting acceleration or pressure comprises: a first semiconductor element that is imparted with the acceleration or the pressure and outputs a voltage or a current of a frequency corresponding to the acceleration or the pressure; and a detecting section for generating a sensor value corresponding to the acceleration or the pressure on the basis of an output of the first semiconductor element. The first semiconductor element includes: a first acoustic wave propagating layer formed on a semiconductor substrate; a first acoustic wave reflecting layer formed such that an acoustic wave is confined in the first acoustic wave propagating layer; and a first contact that is formed on the first acoustic wave propagating layer and is connected to the detecting section. <P>COPYRIGHT: (C)2013,JPO&INPIT |
