发明名称 METAL OXIDE SEMICONDUCTOR HAVING EPITAXIAL SOURCE DRAIN REGIONS AND METHOD OF MANUFACTURING SAME USING DUMMY GATE PROCES
摘要 A method of manufacturing a transistor by which sufficient stress can be applied to a channel region within allowable ranges of concentrations of Ge and C in a mixed crystal layer. A semiconductor device is also provided.
申请公布号 US2013009210(A1) 申请公布日期 2013.01.10
申请号 US201213615799 申请日期 2012.09.14
申请人 SONY CORPORATION;TATESHITA YASUSHI 发明人 TATESHITA YASUSHI
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
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