| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that in a device and method for determining a detect by imaging an inspection surface from multiple directions a mechanism becomes complicated when changing the posture of a work and the orientation of a light-receiving part of imaging means. <P>SOLUTION: A defect detection device includes: light-emitting means (O<SB POS="POST">1</SB>- O<SB POS="POST">8</SB>) capable of emitting light from a direction different from an inspection region T of the surface of a work W towards the inspection region T; lens means (L<SB POS="POST">1</SB>- L<SB POS="POST">8</SB>) for narrowing the light emitted by the light-emitting means (O<SB POS="POST">1</SB>- O<SB POS="POST">8</SB>) and emitting it to the inspection region T; imaging means C fixed in vertical direction to the surface of the inspection region T so that a light-receiving part faces the inspection region T, capable of receiving reflected light of the light emitted by the light-emitting means (O<SB POS="POST">1</SB>- O<SB POS="POST">8</SB>) in the inspection region T; and a control part for controlling the imaging means C to receive the reflected light by the light-receiving part in response to a lighting direction of the light-emitting means (O<SB POS="POST">1</SB>- O<SB POS="POST">8</SB>) and take an image of the surface of the inspection region T corresponding to the light from a different direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
