发明名称 METHOD FOR PROVIDING ORGANIC RESIST ADHESION TO A COPPER OR COPPER ALLOY SURFACE
摘要 The present invention relates to a method for increasing the adhesion of organic resist materials on copper or copper alloy surfaces. The copper or copper alloy surface is contacted with an aqueous adhesion promoting solution comprising at least one organic acid, a peroxide compound and optionally one or more substances selected from the group consisting of urea, derivatives thereof and water-soluble polymers.
申请公布号 WO2013004624(A1) 申请公布日期 2013.01.10
申请号 WO2012EP62733 申请日期 2012.06.29
申请人 ATOTECH DEUTSCHLAND GMBH;HUELSMANN, THOMAS;CLICQUE, ARNO;TEWS, DIRK;KLOPPISCH, MIRKO;LIONG, ANDRY 发明人 HUELSMANN, THOMAS;CLICQUE, ARNO;TEWS, DIRK;KLOPPISCH, MIRKO;LIONG, ANDRY
分类号 C23C22/52;C23F1/18;H05K3/38 主分类号 C23C22/52
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