发明名称 Method of forming an MOS transistor and structure therefor
摘要 In one embodiment, an MOS transistor is formed with trench gates. The gate structure of the trench gates generally has a first insulator that has a first thickness in one region of the gate and a second thickness in a second region of the gate.
申请公布号 US8350318(B2) 申请公布日期 2013.01.08
申请号 US20070840826 申请日期 2007.08.17
申请人 SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC;GRIVNA GORDON M.;ROBB FRANCINE Y. 发明人 GRIVNA GORDON M.;ROBB FRANCINE Y.
分类号 H01L29/66 主分类号 H01L29/66
代理机构 代理人
主权项
地址