发明名称 |
MEMS tunneling accelerometer |
摘要 |
A tunneling accelerometer includes a proof mass that moves laterally with respect to a cap wafer. Either the proof mass or the cap wafer includes a plurality of tunneling tips such that the remaining one of proof mass and the cap wafer includes a corresponding plurality of counter electrodes. The tunneling current flowing between the tunneling tips and the counter electrodes will thus vary as the proof mass laterally displaces in response to an applied acceleration.
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申请公布号 |
US8347720(B2) |
申请公布日期 |
2013.01.08 |
申请号 |
US20100826605 |
申请日期 |
2010.06.29 |
申请人 |
TIALINX, INC.;DE LOS SANTOS HECTOR J.;MOHAMADI FARROKH |
发明人 |
DE LOS SANTOS HECTOR J.;MOHAMADI FARROKH |
分类号 |
G01P15/08 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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