| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multilayer membrane structure which improves characteristics by employing a multilayer membrane and is especially suitable for lower loss unlike a conventional one which aims to improve power resistance, with no attention especially to a loss characteristic, often resulting in degradation in such characteristics. <P>SOLUTION: A cord electrode is formed on a surface acoustic wave substrate. The cord electrode is formed of a main electrode whose main material is AL or Cu. Further, an upper thin membrane whose material is different from the main material is arranged on the main electrode, with the membrane thickness of the main electrode being 7.7-9.7% of surface acoustic wave wavelength. <P>COPYRIGHT: (C)2013,JPO&INPIT |
