发明名称 METHOD FOR FORMING THIN FILM AND METHOD FOR PRODUCING OPTICAL ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for forming a thin film and a method for producing an optical element, which can easily reduce fluctuation in film thickness due to stagnation of a thin film-forming material on the outer edge of an object on which the film is to be formed. <P>SOLUTION: The method for forming the thin film includes supplying the liquid thin film-forming material 9 to a convex part 10a on the object 10 on which the film is to be formed, and rotating the object 10 so as to apply and spread the thin film-forming material 9 on the convex part 10a and an edge flat surface 10b, thereby forming the film. In the method, before the object 10 is rotated, an application guide surface 10c for guiding the thin film-forming material 9 from the outer edge of the edge flat surface 10b further outward is provided. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013000719(A) 申请公布日期 2013.01.07
申请号 JP20110137341 申请日期 2011.06.21
申请人 OLYMPUS CORP 发明人 HOSOKAWA KAZUYUKI
分类号 B05D1/40;G03F7/16 主分类号 B05D1/40
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