| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL element which increases carrier mobility (electron injection) while improving crystallinity of an ITO film by non-thermal processing. <P>SOLUTION: A manufacturing method of an organic EL element of a top emission type includes the steps of: forming a reflection anode 7 which is a first electrode, an organic thin film 12 containing an organic light-emitting layer 12, an electron injection property protection film 13 containing an n-type dopant, and a transparent electrode 14 composed of an ITO which is a second electrode in this order on a substrate 4; and forming a sealing layer 30 so as to cover the first electrode 7, organic thin film 12, electron injection property protection film 13, and a second electrode 14. An XRD diffraction peak intensity in a plane orientation 222 of the ITO film formed on the electron injection property protection film 13 is higher than an XRD diffraction peak intensity of an amorphous ITO film. <P>COPYRIGHT: (C)2013,JPO&INPIT |
