| 摘要 |
<P>PROBLEM TO BE SOLVED: To maintain a discharge performance of a liquid by preventing the voltage from being applied to conductive liquid in a pressurized liquid chamber even when a bias voltage is applied to a lower part electrode. <P>SOLUTION: A vibrating plate 30 for boosting in the pressurized liquid chamber 12 is formed by depositing a silicon oxide film, polysilicon, a silicon oxide film, a p-doped polysilicon, and a silicon oxide film in the order on the surface of a silicon substrate. The p-doped polysilicon in the vibrating plate 30 is grounded (GND). A conductive layer 31 which corresponds to the p-doped polysilicon and is grounded is provided between the lower part electrode 51 and the pressurized liquid chamber 12 in the droplet discharge head. Therefore, when a method for driving by applying the bias voltage to the lower part electrode 51 is used, an electric field is generated between the lower part electrode 51 and the conductive layer 31, and the electric field is not generated between the lower part electrode and the pressurized liquid chamber. <P>COPYRIGHT: (C)2013,JPO&INPIT |
