CLAMPING DEVICE, ASSEMBLY, AND LITHOGRAPHIC PROJECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To restrict the size of electronic circuitry required for alignment and connection of a lithographic projection apparatus and a radiation system.

SOLUTION: A clamping device is constructed and arranged to clamp two parts together. The clamping device includes: an aligner to bring the two parts into an aligned position with respect to each other; a clamp to maintain the two parts in the aligned position; a disconnect to guide the two parts away from the aligned position to a disconnected position; and an actuator to convert an electrical current to kinetic energy.

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