发明名称 REPAIR DEVICE, REPAIR METHOD, AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a repair device and repair method for restoring failed devices to normal insulation states resulting from ESD resistance tests and normal operation tests applied to inspection and operation object devices such as LSI elements, and light emission elements including LED elements and laser elements. <P>SOLUTION: The repair device includes a voltage applying and current supplying circuit 20 serving as current supplying means and voltage applying means which collectively applies electric charge stress to each of a plurality of devices 6 from a high voltage capacitor 7 to be charged by a high voltage power supply 2; and determination means for automatically determining whether each of the plurality of devices 6 is a leak defective device in a state where a current is supplied to each of the plurality of devices 6 from the high voltage power supply 2 after the application of the electric charge stress by the voltage applying and current supplying circuit 20, and, if it is determined to be defective, repeatedly executes a flow of the ESD resistance test until a predetermined number of times is reached. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013003023(A) 申请公布日期 2013.01.07
申请号 JP20110135794 申请日期 2011.06.17
申请人 SHARP CORP 发明人 UCHIDA REN;ISHIKAWA SHINJI
分类号 G01R31/26;H01L21/66;H01L33/00 主分类号 G01R31/26
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