| 摘要 |
<P>PROBLEM TO BE SOLVED: To materialize a pressure sensor having high reliability to abrupt pressure fluctuation such as water impact, stabilizing temperature characteristics, and capable of saving a cost. <P>SOLUTION: A pressure sensor formed with a strain sensor on a measurement diaphragm includes: a first measurement chamber of a recessed-shape formed on one surface of a first insulation substrate; a first pressure guide hole provided on the first insulation substrate, and communicating to the first measurement chamber; a semiconductor substrate joined with one surface of the first insulation substrate on one surface, and forming the measurement diaphragm; a semiconductor strain gauge provided at a position corresponding to the first measurement chamber on the other surface of the semiconductor substrate; a second insulation substrate joined with the other surface of the semiconductor substrate on one surface; a second measurement chamber symmetrically provided on the one surface of the second insulation substrate so as to oppose to the first measurement chamber; and a second pressure guide hole provided on the second insulation substrate and communicating to the second measurement chamber. <P>COPYRIGHT: (C)2013,JPO&INPIT |
