发明名称 PROBE SUPPORTING BOARD AND MANUFACTURING METHOD FOR THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a manufacturing method for probe supporting boards by which insulation between a probe and a probe supporting board can be adequately ensured and be stabilized over time. <P>SOLUTION: A probe supporting board 10 is provided with a layered body formed by stacking and joining to each other a plurality of metal sheets 11 and first and second metal sheets 13 and 14 and an insulating coat 16 that is formed over the upper face of the layered body and electrically insulates a plurality of probes 20 from the layered body. In the second metal sheet 13, out of the plurality of metal sheets 11, 13 and 14, insulative supporting sheets 17 that slidably support lead parts 20C of the probes 20 and have positioning holes 17A for determining the supporting positions for the probes 20 are formed integrally in a plurality of positions; these supporting sheets 17 are held between the first and third metal sheets 11 and 14, with the positioning holes 17A being positioned within a penetrating hole 10A. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013002931(A) 申请公布日期 2013.01.07
申请号 JP20110133755 申请日期 2011.06.15
申请人 TOKYO ELECTRON LTD;WELCON:KK 发明人 FURUYA KUNIHIRO;TAKASE SHINICHIRO;SUZUKI YUTAKA
分类号 G01R1/067;H01L21/66 主分类号 G01R1/067
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