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发明名称
A METHOD OF MAGNETRON SPUTTERING
摘要
申请公布号
KR20130002364(A)
申请公布日期
2013.01.07
申请号
KR20127033839
申请日期
2008.12.04
申请人
OC OERLIKON BALZERS AG
发明人
KADLEC STANISLAV;BALON FRANTISEK;WEICHART JUERGEN;SCHOLTE VAN MAST BART
分类号
C23C14/35;H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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