发明名称 Semiconductor Device
摘要 The present invention relates to an integrated circuit (semiconductor device) for which consolidation of a fine CMOS and a medium/high-voltage MOSFET is assumed to be carried out. A feature of the present invention is a small width (channel length) of a channel region CH. Specifically, when the width of the channel region planarly overlapped with a gate electrode is L and the thickness of the gate electrode is t, the channel region is formed to have the width of the channel region being larger than or equal to ⅕ times the thickness t of the gate electrode and smaller than or equal to the thickness t. Thus, the width L of the channel region can be reduced, and variations in the threshold voltage can be reduced.
申请公布号 US2013001685(A1) 申请公布日期 2013.01.03
申请号 US201213536184 申请日期 2012.06.28
申请人 HITACHI, LTD.;SHIRAKAWA SHINJI;SAKANO JUNICHI 发明人 SHIRAKAWA SHINJI;SAKANO JUNICHI
分类号 H01L29/78 主分类号 H01L29/78
代理机构 代理人
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