发明名称 |
REDEPOSITION TECHNIQUE FOR MEMBRANE ATTACHMENT |
摘要 |
A method for securing a micro-object to a substrate by redeposition. The method includes ion-beam milling the substrate in proximity of the micro-object such that the material milled away from the substrate sprays onto the micro-object and covers its base, effectively attaching it to the substrate. Since no carrier gases are used, the ion beam chamber and its contents are not exposed to undesirable contaminants.
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申请公布号 |
US2013001191(A1) |
申请公布日期 |
2013.01.03 |
申请号 |
US20070161426 |
申请日期 |
2007.01.19 |
申请人 |
FIBICS INCORPORATED;LAGAREC KEN GUILLAUME;PHANEUF MICHAEL WILLIAM;ANDERSON MICHAEL ANTHONY |
发明人 |
LAGAREC KEN GUILLAUME;PHANEUF MICHAEL WILLIAM;ANDERSON MICHAEL ANTHONY |
分类号 |
B44C1/22;B32B37/02 |
主分类号 |
B44C1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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