发明名称 |
BACKGROUND REDUCTION SYSTEM INCLUDING LOUVER |
摘要 |
A background reduction system may include, but is not limited to: a charged particle source configured to generate a charged-particle beam; a louvered structure including one or more apertures configured to selectively transmit charged particles according to their angle of incidence; and a charged-particle detector configured to receive charged particles selectively transmitted by the louvered structure.
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申请公布号 |
US2013001417(A1) |
申请公布日期 |
2013.01.03 |
申请号 |
US201113174020 |
申请日期 |
2011.06.30 |
申请人 |
KLA-TENCOR CORPORATION;NASSER-GHODSI MEHRAN;SEARS CHRISTOPHER;HAYNES ROBERT |
发明人 |
NASSER-GHODSI MEHRAN;SEARS CHRISTOPHER;HAYNES ROBERT |
分类号 |
G01N23/22 |
主分类号 |
G01N23/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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