发明名称 ELECTROMECHANICAL TRANSDUCER
摘要 When the initial displacement greatly varies among cells in an element, there is a need to reduce a bias voltage to be applied between electrodes. This decreases the sensitivity. An electromechanical transducer of the present invention includes an element having a plurality of cells. Each of the cells includes a first electrode and a second electrode that are provided with a cavity being disposed therebetween. A groove is provided at a position at a predetermined distance from the cavity of the cell on the outermost periphery of the element.
申请公布号 US2013000116(A1) 申请公布日期 2013.01.03
申请号 US201213610144 申请日期 2012.09.11
申请人 CANON KABUSHIKI KAISHA;ZAITSU YOSHITAKA;KAWASAKI TAKEHIKO 发明人 ZAITSU YOSHITAKA;KAWASAKI TAKEHIKO
分类号 H05K3/10 主分类号 H05K3/10
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