发明名称 |
APPARATUS AND METHOD OF CONTROLLING CHUCK, AND EXPOSURE APPARATUS AND CONTROL METHOD THEREOF |
摘要 |
Exemplary embodiments of the invention disclose an exposure apparatus and a method of tuning parameters of a chuck, which may reduce a time taken to level the chuck by previously tuning parameters of the chuck. The method of tuning parameters of a chuck includes detecting a tilt component of the chuck, performing chuck tilt adjustment to minimize the tilt component of the chuck, and tuning the parameters of the chuck if a residual tilt component is present after performing the chuck tilt adjustment.
|
申请公布号 |
US2013001898(A1) |
申请公布日期 |
2013.01.03 |
申请号 |
US201213535603 |
申请日期 |
2012.06.28 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD.;KIM JA YUL;JANG SANG DON;SON TAE KYU |
发明人 |
KIM JA YUL;JANG SANG DON;SON TAE KYU |
分类号 |
B23B31/02;B23Q7/00 |
主分类号 |
B23B31/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|