发明名称 |
PIXEL SENSORS OF MULTIPLE PIXEL SIZE AND METHODS OF IMPLANT DOSE CONTROL |
摘要 |
CMOS pixel sensors with multiple pixel sizes and methods of manufacturing the CMOS pixel sensors with implant dose control are provided. The method includes forming a plurality of pixel sensors in a same substrate and forming a masking pattern over at least one of the plurality of pixel sensors that has a pixel size larger than a non-masked pixel sensor of the plurality of pixel sensors. The method further includes providing a single dosage implant to the plurality of pixel sensors. The at least one of the plurality of pixel sensors with the masking pattern receives a lower dosage than the non-masked pixel sensor.
|
申请公布号 |
US2013001732(A1) |
申请公布日期 |
2013.01.03 |
申请号 |
US201213611423 |
申请日期 |
2012.09.12 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION;ELLIS-MONAGHAN JOHN J.;GAMBINO JEFFERY P.;MAYNARD DANIEL N.;RASSEL RICHARD J. |
发明人 |
ELLIS-MONAGHAN JOHN J.;GAMBINO JEFFERY P.;MAYNARD DANIEL N.;RASSEL RICHARD J. |
分类号 |
H01L27/144;G06F17/50 |
主分类号 |
H01L27/144 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|