发明名称 MEMS-BASED MAGNETIC SENSOR WITH A LORENTZ FORCE ACTUATOR USED AS FORCE FEEDBACK
摘要 A magnetic sensor utilizes a MEMS device that has at least one vibrating member and at least one conductive path integral with the vibrating member so that a current flows along the vibrating member and in the presence of a magnetic field interaction of the magnetic field and the point charges in the current on the conductive path due to the Lorentz force causes a change in vibration of the vibrating member. That change can be used to provide a measure of the magnetic field.
申请公布号 US2013002244(A1) 申请公布日期 2013.01.03
申请号 US201113174417 申请日期 2011.06.30
申请人 QUEVY EMMANUEL P. 发明人 QUEVY EMMANUEL P.
分类号 G01R33/02 主分类号 G01R33/02
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