发明名称 |
Volatile group 2 metal precursors |
摘要 |
A compound comprising one or more polyfunctionalized pyrrolyl anions coordinated to a metal selected from the group consisting of barium, strontium, magnesium, radium or calcium or mixtures thereof. Alternatively, one anion can be substituted with and a second non-pyrrolyl anion. Synthesis of the novel compounds and their use to form BST films is also contemplated. |
申请公布号 |
EP2540731(A1) |
申请公布日期 |
2013.01.02 |
申请号 |
EP20120186256 |
申请日期 |
2010.05.28 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
NORMAN,, JOHN ANTHONY THOMAS |
分类号 |
C07F3/00;C23C16/00 |
主分类号 |
C07F3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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