发明名称 Volatile group 2 metal precursors
摘要 A compound comprising one or more polyfunctionalized pyrrolyl anions coordinated to a metal selected from the group consisting of barium, strontium, magnesium, radium or calcium or mixtures thereof. Alternatively, one anion can be substituted with and a second non-pyrrolyl anion. Synthesis of the novel compounds and their use to form BST films is also contemplated.
申请公布号 EP2540731(A1) 申请公布日期 2013.01.02
申请号 EP20120186256 申请日期 2010.05.28
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 NORMAN,, JOHN ANTHONY THOMAS
分类号 C07F3/00;C23C16/00 主分类号 C07F3/00
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